Micro-Nano Electronics

  • Name:Bin Yang
  • Title:Associate Professor
  • Office:
  • Office Phone:86-21-34206683
  • Email:binyang@sjtu.edu.cn
  • Website:

Research Field

1)Micro/nano energy harvester;
2)THz metamaterial device and its application;
3)MEMS sensors including high temperature, gas and humidity sensors


04.2003 ~06. 2006 PhD degree in Electronic Science and Technology,Shanghai Jiao Tong University, China.
09.2000 ~03.2003 MS degree in Materials Science,Jilin University, China.

Work experience

05.2011-, Associate Professor, Shanghai Jiao Tong University
08.2009~04.2011 Senior R & D Engineer AAC Acoustic Technologies(Singapore) Holdings Inc.
11.2007~07.2009 Senior Research Engineer, Institute of Microelectronics, Singapore.
08.2006 ~10.2007 Research Fellow of Mechanical Engineering, National University of Singapore.


1) 2013.1~2015.12, NSFC, MEMS-based micro energy harvester for the application of internet of things, PI
2) 2015.4-2018.3, 863 Project, Piezoelectric energy harvester and its application, PI
3) 2013.8-2015.8 Shanghai Pujiang Talent Project, PI

Awards and Honors

1)2014 First prize of natural science of Ministry of Education
2)2013 Shanghai "Pujiang" Talent


1)Master course: Microsensors and Microcctuators
2)Bachelor course: Design of Micro and nano sensors


一、 Books
[1] Bin Yang, Huicong Liu, Jingquan Liu, Chengkuo Lee,《Micro and Nano Energy Harvesting Technologies》,Artech House, 2014, 291pages, ISBN:978-1-60807-814-1
[2] Bin Yang, Jingquan Liu, 《Chapter 3 Micro/nano Fabrication Techonlogies for vibration-based energy harvester》, Gang Zhang, Navin Manjooran,《Nanofabrication and its fabrication in renewable Energy》, RSC House, 2014,225 pages,ISBN:1849736405

二、 Published papers

2017 year
[1] Zhiran Yi, Yang Bin(*), Guimiao Li, Jingquan Liu, Xiang Chen, Xiaolin Wang and Chunsheng Yang,High performance bimorph piezoelectric MEMS harvester via bulk PZT thick films on thin beryllium-bronze substrate, accepted by Applied Physics Letters, 2017.
[2] Wenlong Zhang, Yang Bin(*), Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang, Highly sensitive and low operating temperature SnO2gas sensordoped by Cu and Zn two elements, Sensors and Actuators B: Chemical,2017,243:982-989.
[3] Xingzhao Wang, Yang Bin(*), Jingquan Liu and Chunsheng Yang, A transparent and biocompatible single-frictionsurface triboelectric and piezoelectric generator and body movement sensor, Journal of Materials Chemistry A, 2017, 5,1176-1183.
[4] Kailing Shih, Prakash Pitchappa, Manukumara Manjappa, Chong Pei Ho, Ranjan Singh, Bin Yang, Navab Singh, Chengkuo Lee, Active MEMS metamaterials for THz bandwidth control, Applied Physics Letters, Vol. 110, pp. 161108, 2017.
[5] Dihan Hasan, Prakash Pitchappa, Jiahui Wang, Tao Wang, Bin Yang, Chong Pei Ho, Chengkuo Lee, Novel CMOS-compatible Mo-AlN-Mo platform for metamaterial-based Mid-IR absorber, ACS Photonics, 4(2), 2017, 302-315.
[6] Hairun Chen, Bin Yang, Xiaoqing Zhao, Yan Gui, Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang, A “T” shaped flexible multiband ultra-thin terahertz metamaterial with consistent curved transmission spectra, Materials Research Express, 4, 2017, 066201.

2016 year
[1] Gang Tang, Yang Bin(*), Cheng Hou, Guimiao Li, Jingquan Liu, Xiang Chen, Chunsheng Yang, A piezoelectric micro generator worked at low frequency and high acceleration based on PZT and phosphor bronze bonding, Scientific Reports,2016,6:38798.
[2] Xingzhao Wang, Yang Bin(*), Jingquan Liu, Yanbo Zhu, Chunsheng Yang, Qing He, A flexible triboelectric-piezoelectric hybrid nanogenerator based on P(VDF-TrFE) nanofibers and PDMS/ MWCNT for wearable devices, Scientific Reports,2016,6:36409.
[3] Hasan Dihan,Ho Chong Pei,Pitchappa Prakash, Yang Bin(*),Yang, Chunsheng,Lee Chengkuo,Thermoplasmonic Study of a Triple Band Optical Nanoantenna Strongly Coupled to Mid IR Molecular Mode,Scientific Reports,2016,6:22227。
[4] Zhu Yanbo,Yang Bin(*) ,Liu Jingquan,Wang Xingzhao,Wang, Luxiang,Chen Xiang,Yang Chunsheng,A flexible and biocompatible triboelectric nanogenerator with tunable internalresistance for powering wearable devices, Scientific Reports,2016,6:22233。
[5] Xiaoqing Zhao, Yang Bin(*), Jingquan Liu, Prakash Pitchappa, Dihan Hasan, Chong Pei Ho, Chunsheng Yang and Chengkuo Lee,A multiband flexible terahertz metamaterial with curvature sensing functionality, Journal of optics, 18, 2016, 075101
[6] Yan Gui, Yang Bin(*), Xiaoqing Zhao, Jingquan Liu, Xiang Chen, XiaolinWang, Chunsheng Yang, Angular and polarization study of flexible metamaterials with double split-ring resonators on parylene-C substrate, Applied Physics Letters, Vol. 109, pp. 161905, 2016.
[7] Jie Liu, Yang, Bin(*), Jingquan Liu, Xiang Chen, Xiaolin Wang, and Chunsheng Yang, Development and characterization of resonator- and delay lines-based sensors on AlN/sapphire substrate for high-temperature application, J. Micro/Nanolith. MEMS MOEMS 15(4), 045002.
[8] Wenlong Zhang, Yang, Bin(*), Jingquan Liu, Controlled synthesis of SnO2 nanoneedles using one-step templatefree hydrothermal method, J Mater Sci: Mater Electron (2016) 27:11536–11540
[9] Xiaoyang Kang, Jingquan Liu, Hongchang Tian, Bin Yang, Yanna NuLi, Chunsheng Yang, Sputtered iridium oxide modified flexible parylene microelectrodes array for electrical recording and stimulation of muscles, Sensors and Actuators B: Chemical,2016,225:267-278.
[10] Hui-Ling Peng, Jing-Quan Liu, Hong-Chang Tian, Yun-Zhao Dong, Bin Yang, Xiang Chen, Chun-Sheng Yang, A novel passive electrode based on porous Ti for EEG recording, Sensors and Actuators B: Chemical,2016,226:349-356.
[11] Hong-Chang Tian, Jing-Quan Liu, Xiao-Yang Kang, Long-Jun Tang, MingHao Wang, Bo-Wen Ji, Bin Yang, Xiao-Lin Wang, Xiang Chen & ChunSheng Yang, Enhanced Flexible Tubular
Microelectrode with Conducting Polymer for Multi-Functional Implantable Tissue-Machine Interface, Scientific Reports,2016,6:26910。
[12] Luxian Wang, Huiling Peng, Xiaolin Wang, Xiang Chen, Chunsheng Yang, Bin Yang and Jingquan Liu, PDMS/MWCNT-based tactile sensor array with coplanar electrodes for crosstalk suppression, Microsystems & Nanoengineering, 2016, 2:16065.
[13] Wen-Ming Zhang, Kai-Ming Hu, Bin Yang, Zhi-Ke Peng and Guang Meng, Effects of surface relaxation and reconstruction on the vibration characteristics of nanobeams, Journal of Physics D: Applied Physics, 2016, 49:165304
[14] Tao Wang, Jingquan Liu, Bin Yang, Xiang Chen, Xiaolin Wang and Chunsheng Yang, Optimization of micropipette fabrication by laser micromachining for application in an ultrafne atmospheric pressure plasma jet using response surface methodology, Journal of Micromechanics and Microengineering, 2016, 26:065001
[15] Tao Wang, Bin Yang, Xiang Chen, Xiaolin Wang, Chunsheng Yang, Jingquan Liu, Nonhomogeneous surface properties of parylene-C film etched by an atmospheric pressure He/O2 micro-plasma jet in ambient air, Applied Surface Science, 2016, 383:261-267

2015 year
[1] Zhu, Yanbo,Yang, Bin(*) ,Liu, Jingquan,Wang, Xingzhao,Chen, , Xiang,Yang, Chunsheng,An Integrated Flexible Harvester Coupled Triboelectric and Piezoelectric Mechanisms Using PDMS/MWCNT and PVDF,Journal of Microelectromechanical Systems,2015,24(3):513-515.
[2] Zhao Xiaoqing ,Yang Bin(*) ,Liu Jingquan,Tang Gang,Yang Chunsheng,, Designand simulation of continuously tunable multiband terahertz metamaterials, Sensors and Materials,2015,27(11):1103-1111。
[3] Honglei Guo, Jingquan Liu, Bin Yang, Xiang Chen, Chunsheng Yang, Localized etching of polymer films using an atmospheric pressure air microplasma jet, Journal of Micromechanics and Microengineering, 25 (2015) 015010
[4] Chuan Zhang, Jingquan Liu, Hongchang Tian, Xiaoyang Kang, Jingcheng Du, Yuefeng Rui, Bin Yang, Chunsheng Yang, Implantable electrode array with platinum black coating for brain stimulation in fish. Microsystem Technologies, 21, 139-145, 2015
[5] Guo, Jie ,Zhan, Guanghui,Liu, Jingquan , Yang, Bin, Xu, Bin,Jie,Feng, Chen, Xiang,Yang, Chunsheng,Hopping conduction in zirconium oxynitrides thin film deposited by reactive magnetron sputtering,Physica B: Condensed Matter,2015,475:86-89。
[6] Guo, Jie,Liu, Jingquan,Yang, Bin, Zhan, Guanghui,Kang, Xiaoyang,Tian, Hongchang,Tang, Longjun,Chen, Xiang,Yang, Chunsheng,Low-Voltage Transient/Biodegradable Transistors Based on Free-Standing Sodium Alginate Membranes,IEEE Electron Device Letters,2015,36(6):576-578
[7] Guo, Jie,Liu, Jingquan,Yang, Bin, Zhan, Guanghui, Tang, Longjun, Tian, Hongchang, et al., Biodegradable Junctionless Transistors With Extremely Simple Structure, IEEE Electron Device Letters,2015,36(9):908-910.
[8] J.Q. Liu*, Y.F. Rui, X.Y. Kang, B. Yang, X. Chen, C.S. Yang, A Novel Transdermal Power Transfer Device for the Application of Implantable Microsystems, Micromachines, 6(2015) 396-408. (IF=1.269) SCI
[9] H.L. Peng, J.Q. Liu*, H.C. Tian, B. Xu, Y.Z. Dong, B. Yang, et al., Flexible dry electrode based on carbon nanotube/polymer hybrid micropillars for biopotential recording, Sensors and Actuators A: Physical, 235(2015) 48-56. (IF=1.903) SCI
[10] G.H. Zhan, J.Q. Liu*, J. Guo, J. Feng, B. Xu, B. Yang, et al., Electrical transport property of zirconium oxynitride thin film deposited by magnetron sputtering process, Journal Of Materials Science-Materials In Electronics, 26(2015) 9188-94. (IF=1.569) SCI
[11] Bin Xu, Jing-quan Liu*,Shui-dong Jiang, Gang Tang, Yan Xiao-xiao, Bin Yang, Xiang Chen,Chun-sheng Yang, “Design and Microfabrication of Cooling Arm for Inertial Confinement Fusion Application”, Sensors and Materials, 2015.Vol.27(11):1091-1101. (IF=0.45) SCI
[12] Xiaoyang Kang, Jing-Quan Liu, Hongchang Tian, Bin Yang, Yanna Nuli, and Chunsheng Yang, Self-Closed Parylene Cuff Electrode for Peripheral Nerve Recording, Journal of Microelectromechanical Systems,2015,24(2):319-332.
[13] Xiaoyang Kang, Jingquan Liu, Hongchang Tian, Bin Yang, Hongying Zhu, Yanna NuLi, Jiale Shu, Zhiwei Liu and Chunsheng Yang, Surgical suture inspired wire microelectrodes implant for enhancing functional electrical stimulation, Microsystem Technologies, 2015, 21: 611-617
[14] Long Fei Wang, Jing Quan Liu, Bin Yang, Xiang Chen, Chun Sheng Yang, Fabrication and characterization of a dry electrode integrated Gecko inspired dry adhesive medical patch for long term ECG measurement, Microsystem Technologies, 2015, 21: 611-617

2014 year
[1] Bin Yang, Yanbo Zhu, Xingzhao Wang, Jingquan Liu, Xiang Chen, Chunsheng Yang, High performance PZT thick films based on bonding techniques for d31 mode harvester with integrated proof mass, Sensors and Actuators A: Physical, 2014, Vol. 214, 88-94,
[2] Bin Yang, Yanbo Zhu, Xingzhao Wang, Jingquan Liu, Chunsheng Yang, Fabrication and Characterization of d33 Mode (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) Energy Harvester, Sensors and Materials, 2014, 26(8), 591-598,
[3] Qing He, Jingquan Liu, Bin Yang, Xingzhao Wang, Xiang Chen, Chunsheng Yang, MEMS-based ultrasonic transducer as the receiver for wireless power supply of the implantable microdevices, Sensors and Actuators A: Physical, 2014, Vol. 219, 65-72